The Stanford Nanofabrication Facility (SNF) is a 10,000 square foot, Class 100 cleanroom housing ultra clean H7 labs and a complete suite of tools and plasma processing equipment for the micro- and nanofabrication used for semiconductor-based research. The SNF is housed in the Paul G. Allen building (formerly the CIS building) and is operational 24 hours a day, 7 days a week. SNF is a member of the National Science Foundation’s (NSF) National Nanotechnology Infrastructure Network (NNIN) a consortium of 14 University shared-use facilities with the directive of providing nanofabrication resources to industrial and government and receives partial funding from the NSF. The SNF currently supports nearly 600 researchers a year, not only from Stanford, but other universities and local industry, including large firms such as IBM and Applied Materials. The budget for this $4.9 million renovation and upgrade project was supported in part by a grant from the National Science Foundation (NSF). The scope of our work includes:

• Replace piping with double-contained piping
• In the Photolithography Area, upgrade Litho Solvent Exhaust system and replace a Halon system with overhead sprinkler coverage
• New Process Gas Distribution to support new equipment including new gas cabinets and Valve Manifold Boxes.
• Remove and install a new Toxic Gas (TGO) Monitoring System which supports labs throughout both the Allen and Annex buildings
• Replace a Burnbox in service area of the cleanroom
• Install additional 208/120V panels in the sub-fab locations for future expansion
• Install a new gravity return Process Cooling Water system with upsized piping
• Replace the Litho Humidity Control System
• Replace the HEPA Air Handling Units throughout the cleanroom and Allen 159